Silicon mirror arrays fabricated by using bulk and surface micromachining
- Author(s):
Gessner,T. ( Technical Univ.of Chemnitz-Zwickau ) Dotzel,W. Billep,D. Hahn,R. Kaufmann,C. Kehr,K. Kurth,S. Steiniger,C. Wollmann,U. - Publication title:
- Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3008
- Pub. Year:
- 1997
- Page(from):
- 296
- Page(to):
- 305
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424198 [0819424196]
- Language:
- English
- Call no.:
- P63600/3008
- Type:
- Conference Proceedings
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