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Micro-optic fabrication using one-level gray-tone lithography

Author(s):
Publication title:
Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3008
Pub. Year:
1997
Page(from):
279
Page(to):
288
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424198 [0819424196]
Language:
English
Call no.:
P63600/3008
Type:
Conference Proceedings

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