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Optical characterization methods of InP-based micro-opto-electro-mechanical systems

Author(s):
Dantec,R.Le ( Institut National des Sciences Appliquees de Lyon )
Benyattou,T.
Guillot,G.
Seassal,C.
Leclercq,J.-L.
Letartre,X.
Gagnaire,A.
Gendry,M.
Viktorovitch,P.
Benferhat,R.
Rondi,D.
Blondeau,R.R.
7 more
Publication title:
Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3008
Pub. date:
1997
Page(from):
258
Page(to):
264
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424198 [0819424196]
Language:
English
Call no.:
P63600/3008
Type:
Conference Proceedings

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