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Strength of indium-phosphide-based microstructures

Author(s):
Greek,S. ( Uppsala Univ. )
Hjort,K.
Schweitz,J.-A.
Seassal,C.
Leclercq,J.-L.
Gendry,M.
Besland,M.-P.
Viktorovitch,P.
Figuet,C.
Souliere,V.
Monteil,Y.
6 more
Publication title:
Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3008
Pub. date:
1997
Page(from):
251
Page(to):
257
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424198 [0819424196]
Language:
English
Call no.:
P63600/3008
Type:
Conference Proceedings

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