Optical probe for micromachine performance analysis

Optical probe for micromachine performance analysis

Author(s):

Dickey,F.M. ( Sandia National Labs. )
Holswade,S.C.
Smith,N.F.
Miller,S.L.

Publication title:

Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3008

Pub. Year:

1997

Page(from):

52

Page(to):

61

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424198 [0819424196]

Language:

English

Call no.:

P63600/3008

Type:

Conference Proceedings

Details

TDL ID:	ZA00019822
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Miniaturized Systems with Micro-Optics and Micromechanics
Conf. info. (Number):	1997 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1997.02.10-1997.02.12

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