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In-situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques

Author(s):
Publication title:
Nondestructive Evaluation for Process Control in Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2948
Pub. Year:
1996
Page(from):
131
Page(to):
135
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819423528 [0819423521]
Language:
English
Call no.:
P63600/2948
Type:
Conference Proceedings

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