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Spectrophotometry and beam profile reflectometry measurement of six layers in an SOI film stack

Author(s):
Leng,J.M. ( Therma-Wave,Inc. )
Sidorowich,J.J.
Yoon,Y.D.
Opsal,J.L.
Lee,B.H.
Cha,G.
Moon,J.
Lee,S.I.
3 more
Publication title:
Optical characterization techniques for high-performance microelectronic device manufacturing III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2877
Pub. date:
1996
Page(from):
166
Page(to):
172
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422750 [0819422754]
Language:
English
Call no.:
P63600/2877
Type:
Conference Proceedings

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