Formation of oxygen-related donors during transition from thermal donors to new donors in CZ-silicon

Formation of oxygen-related donors during transition from thermal donors to new donors in CZ-silicon

Author(s):

Singh,S. ( G.B.Pant Univ.of Agriculture and Technology )
Prakash,O.

Publication title:

Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2877

Pub. Year:

1996

Page(from):

70

Page(to):

78

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422750 [0819422754]

Language:

English

Call no.:

P63600/2877

Type:

Conference Proceedings

Details

TDL ID:	ZA00019809
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing
Conf. info. (Number):	1996 : 3rd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1996.10.16-1996.10.17

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