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New correction method for FTIR online film thickness measurement

Author(s):
Publication title:
Advanced materials for optics and precision structures : 8 August 1996, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2857
Pub. Year:
1996
Page(from):
12
Page(to):
20
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422453 [0819422452]
Language:
English
Call no.:
P63600/2857
Type:
Conference Proceedings

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