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Electrical test structures replicated in silicon-on-insulator material

Author(s):
Cresswell,M.W. ( National Institute of Standards and Technology )
Sniegowski,J.J.
Ghoshtagore,R.N.
Allen,R.A.
Linholm,L.W.
Villarrubia,J.S.
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2725
Pub. date:
1996
Page(from):
659
Page(to):
676
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421012 [0819421014]
Language:
English
Call no.:
P63600/2725
Type:
Conference Proceedings

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