Blank Cover Image

Real-time on-wafer evaluation of contaminant-induced defects from resist processing

Author(s):
Publication title:
Metrology, Inspection, and Process Control for Microlithography X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2725
Pub. date:
1996
Page(from):
206
Page(to):
216
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421012 [0819421014]
Language:
English
Call no.:
P63600/2725
Type:
Conference Proceedings

Similar Items:

Burke,P., Lowell,J.K., Jastrzebski,L.

SPIE-The International Society for Optical Engineering

Hudzik, J.S., Kishkovich, O.P., Higley, J.K.

SPIE-The International Society for Optical Engineering

Ackmann,P.W., Brown,S.E., Edwards,R., Downey,D., Michael,M., Turnquest,K., Nistler,J.L.

SPIE-The International Society for Optical Engineering

Stuber,A., Lowell,J.K.

SPIE-The International Society for Optical Engineering

Ackmann,P.W., Brown,S.E., Nistler,J.L., Spence,C.A.

SPIE-The International Society for Optical Engineering

Barnes, S.E., Sibley, M.G., Brown, E.C., Coates, P., Scowen, I.J., Edwards, H.G.

Society of Plastics Engineers

Unlu, K., Wehring, B.W., Hossain, T.Z., Lowell, J.K.

Electrochemical Society

De Gendt, S., Lux, M., Claes, M., Van Hoeymissen, J., Conrad, T., Worth, W., Lagrange, S., Bergman, E., Jassal, A.S., …

Electrochemical Society

Unlu,K., Wehring,B.W., Hossain,T.Z., Lowell,J.K.

SPIE-The International Society for Optical Engineering

Sherry, Julia, Lowell, John, Hossain, Tim, DeBusk, Damon

MRS - Materials Research Society

Minnis, P., Smith, W.L., Nguyen, Jr.L., Spangenberg, D.A., Heck, P.W., Palikonda, R., Ayers, J.K., Wolff, C., Murray, …

SPIE - The International Society of Optical Engineering

Heaney,J.B., Stewart,K.P., Bradley,S.E., Alley,P.W.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12