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Deposition of oxide thin films on silicon using organic self-assembled monolayers

Author(s):
DeGuire,M.R. ( Case Western Reserve Univ. )
Shin,H.
Collins,R.J.
Agarwal,M.
Sukenik,C.N.
Heuer,A.H.
1 more
Publication title:
Integrated Optics and Microstructures III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2686
Pub. date:
1996
Page(from):
88
Page(to):
99
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420602 [0819420603]
Language:
English
Call no.:
P63600/2686
Type:
Conference Proceedings

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