All-silicon waveguides and bulk-etched alignment structures on(110)silicon for integrated micro-opto-mechanical systems

Author(s):

• Smith,S.W. ( Case Western Reserve Univ. )
• Mehregany,M.
• Merat,F.L.
• Smith,D.A.

Publication title:

Integrated Optics and Microstructures III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2686

Pub. Year:

1996

Page(from):

17

Page(to):

28

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420602 [0819420603]

Language:

English

Call no.:

P63600/2686

Type:

Conference Proceedings