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Effects of PE-TEOS process on O3-TEOS characteristics and device reliability

Author(s):
Jang,S.M. ( Taiwan Semiconductor Manufacturing Co. )
Lin,Y.M.
Lee,P.
Liu,L.M.
Yu,C.H.
Lei,T.F.
Lin,M.S.
2 more
Publication title:
Microelectronic Device and Multilevel Interconnection Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2636
Pub. Year:
1995
Page(from):
307
Page(to):
316
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420022 [0819420026]
Language:
English
Call no.:
P63600/2636
Type:
Conference Proceedings

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