Integrity of N2O oxides in WSi2 polycide process
- Author(s):
- Chien,C.J. ( Integrated Device Technology )
- Choi,J.Y.
- Lo,G.
- Lien,C.-D.
- Publication title:
- Microelectronic Device and Multilevel Interconnection Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2636
- Pub. Year:
- 1995
- Page(from):
- 165
- Page(to):
- 169
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420022 [0819420026]
- Language:
- English
- Call no.:
- P63600/2636
- Type:
- Conference Proceedings
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