Blank Cover Image

Thermal Plasma Chemical Vapor Deposition

Author(s):
Publication title:
Plasma properties, deposition and etching
Title of ser.:
Materials science forum
Ser. no.:
140-142
Pub. Year:
1993
Page(from):
477
Page(to):
496
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496709 [087849670X]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Thermal Plasma Chemical Vapor Deposition of Superhard Nanostructured Si-C-N Coatings

Wagner, Nicole J., Cordill, Megan J., Zajickova, Lenka, Gerberich, William W., Heberlein, Joachim V. R.

Materials Research Society
7 Conference Proceedings Thermal Stabilization And Crystallization Of Nanometric Particles Of Si-C-N Produced By RF-Plasma Enhanced Chemical-Vapor-Deposition

Bertran, E., Farjas, J., Garcia-Caurel, E., Polo, M. C., Roura, P., Viera, G.

Materials Research Society
2 Conference Proceedings Plasma Generation*

Pfender, E.

North-Holland
8 Conference Proceedings DEPOSITION OF GaN BY REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION (Remote PECVD)

Choi, S.W., Bachmann, K.J., Lucovsky, G.

Materials Research Society
3 Conference Proceedings METAL REINFORCED DIAMOND COMPOSITE FILMS

Tsai, C., Nelson, J., Gerberich, W., Heberlein, J., Pfender, E.

Materials Research Society
9 Conference Proceedings Deposition of TiO2 thin films by plasma-enhanced chemical vapor deposition

Li,W., Zhao,J., Zhao,X.-L., Cai,B.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Beta-SiC SYNTHESIS IN A THERMAL ARGON PLASMA JET REACTOR

Kong, Peter C., Pfender, E

Materials Research Society
10 Technical Paper Theoretical radiative transport results for a free-burning arc using a line-by-line technique

Menart, J., Heberlein, J., Pfender, E.

American Institute of Aeronautics and Astronautics
5 Conference Proceedings Thermal Desorption of Hydrogen in Si and SiC Nanoparticles Produced by Plasma-Enhanced Chemical Vapor Deposition

Costa, J., Fort, J., Sunol, J. J., Roura, P., Viera, G., Bertran, E.

MRS - Materials Research Society
11 Conference Proceedings ONE STEP PREPARATION OF Y-Ba-Cu-O SUPERCONDUCTING FILMS BY THE RF THERMAL PLASMA CVD

Zhu, H., Lau, Y. C., Pfender, E.

Materials Research Society
6 Conference Proceedings Thermal Plasma Destruction of Hazardous Waste with Simultaneous Production of Valuable Coproducts

Han, Q. Y., Zhuang, Q. D., Heberlein, J. V. R., Tormanen, W.

American Chemical Society
12 Conference Proceedings Plasma Enhanced Chemical Vapor Deposition and Characterization of Hydrogenated Amorphous SiC Films on Si

Wang, Y., Lin, J., Feng, Z. C., Chua, S. J., Alfred, C. H. H.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12