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Contactless embossing ot microlenses:a new technology for manufacturing refractive microlenses

Author(s):
  • Schulze,J. ( Institute of Microtechnology Mainz GmbH(FRG) )
  • Ehrfeld,W. ( Institute of Microtechnology Mainz GmbH(FRG) )
  • Lowe,H. ( Institute of Microtechnology Mainz GmbH(FRG) )
  • Michel,A. ( Institute of Microtechnology Mainz GmbH(FRG) )
  • Picard,A. ( Institute of Microtechnology Mainz GmbH(FRG) )
Publication title:
Micro-optical technologies for measurement, sensors, and microsystems II and Optical fiber sensor technologies and applications : 18-20 June 1997, Munich, FRG
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3099
Pub. Year:
1997
Vol.:
Part 1
Page(from):
89
Page(to):
98
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425195 [0819425192]
Language:
English
Call no.:
P63600/3099
Type:
Conference Proceedings

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