Optical-fiber-interconnected MEMS sensors and actuators

Optical-fiber-interconnected MEMS sensors and actuators

Author(s):

Miller,M.B. ( F&S Inc. )
Meller,S.A. ( F&S Inc. )
Wavering,T.A. ( F&S Inc. )
Greene,J.A. ( F&S Inc. )
Murphy,K.A. ( F&S Inc. )

Publication title:

Smart structures and materials 1998 : Sensory phenomena and measurement instrumentation for smart structures and materials : 2-4 March 1998, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3330

Pub. Year:

1998

Page(from):

174

Page(to):

179

Pub. info.:

Bellingham: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427748 [0819427748]

Language:

English

Call no.:

P63600/3330

Type:

Conference Proceedings

Details

TDL ID:	ZA00019708
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures and Materials
Conf. info. (Number):	1998
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1998.03.02-1998.03.04

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