X-ray micromachining with a laser-plasma source at 1-nm wavelength (Invited Paper)

X-ray micromachining with a laser-plasma source at 1-nm wavelength (Invited Paper)

Author(s):

Turcu,I.C.E. ( Rutherford Appleton Lab. (UK) )

Mann,C.M. ( Rutherford Appleton Lab. (UK) )

Moon,S.W. ( Rutherford Appleton Lab. (UK) and Korea Institute of Science and Technology )

Maddison,B.J. ( Rutherford Appleton Lab. (UK) )

Allott,R.M. ( Rutherford Appleton Lab. (UK) )

Lisi,N. ( Rutherford Appleton Lab. (UK) )

Huq,S.E. ( Rutherford Appleton Lab. (UK) )

Kim,N.S. ( Rutherford Appleton Lab. (UK) and Kumho Information and Telecommunication Lab. (Korea) )

3 more

Publication title:

ROMOPTO '97, Fifth Conference on Optics, 9-12 September, 1997, Bucharest, Romania

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3405

Pub. Year:

1998

Vol.:

Part 1

Page(from):

162

Page(to):

173

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819428578 [0819428574]

Language:

English

Call no.:

P63600/3405

Type:

Conference Proceedings

Details

TDL ID:	ZA00019701
Series ID:	PA00000029
Conf. info. (Name):	Conference on Optics - ROMOPTO
Conf. info. (Number):	1997 : 5th
Conf. info. (Venue):	Bucharest, Romania
Conf. info. (Date):	1997.09.09-1997.09.12

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