Planarization technology of a-Si: H TFTs for AM LCDs (Invited Paper)
- Author(s):
- Lan,J.-H. ( Univ.of Michigan (USA) )
- Kanicki,J. ( Univ.of Michigan (USA) )
- Publication title:
- Display technologies II : 9-11 July 1998, Taipei, Taiwan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3421
- Pub. Year:
- 1998
- Page(from):
- 170
- Page(to):
- 182
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819428752 [0819428752]
- Language:
- English
- Call no.:
- P63600/3421
- Type:
- Conference Proceedings
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