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Effect of effective intrinsic a-Si: H thickness for backchannel-etch-type a-Si TFTs

Author(s):
  • Tsai,J.-W. ( Unipac Optoelectronics Corp. (Taiwan) )
  • Luo,F.-C. ( Unipac Optoelectronics Corp. (Taiwan) )
  • Cheng,H.-C. ( National Chiao Tung Univ.(Taiwan) )
Publication title:
Display technologies II : 9-11 July 1998, Taipei, Taiwan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3421
Pub. Year:
1998
Page(from):
159
Page(to):
162
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428752 [0819428752]
Language:
English
Call no.:
P63600/3421
Type:
Conference Proceedings

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