Blank Cover Image

Plasma diagnostics in KrF excimer laser deposition of Ti thin films

Author(s):
  • Hong,M.H. ( National Univ.of Singapore )
  • Lu,Y.F. ( National Univ.of Singapore )
  • Ho,T.M. ( National Univ.of Singapore )
  • Lu,L.W. ( Chartered Semiconductor Manufacturing Pte. Ltd. (Singapore) )
  • Low,T.S. ( National Univ.of Singapore )
Publication title:
Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3550
Pub. Year:
1998
Page(from):
441
Page(to):
449
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430113 [0819430110]
Language:
English
Call no.:
P63600/3550
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings KrF excimer laser deposition of titanium thin films on silicon substrates

Lu,L.W., Lu,Y.F., Hong,H., Ho,T.M., Low,T.S.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Optical detection of laser plasma interaction during laser ablation

Hong,M.H., Lu,Y.F.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings Excimer laser irradiation on NiP surface

Liu,D.M., Lu,Y.F., Yiang,K.Y., Song,W.D., Hong,M.H., Low,T.S.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Audible acoustic wave real-time monitoring in laser processing of microelectronic materials

Hong,M.H., Lu,Y.F., Song,W.D., Liu,D.M., Low,T.S.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Magnetic Field Generation At Early-Stage KrF Excimer Laser Ablation Of Solid Substrates

Hong, M.H., Lu, Y.F., Foong, A., Chong, T.C.

Materials Research Society
9 Conference Proceedings Laser microbumping and contamination-free tagging on magnetic hard disk surfaces: techniques and applications

Liu,D., Wee,T.S., Yuan,Y., Lu,Y.F., Hong,M.H., Goh,R.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Laser cleaning of magnetic disks

Song,W.D., Lu,Y.F., Hong,M.H., Low,T.S.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Diagnostics and real-time monitoring of pulsed laser ablation

Hong,M.H., Lu,Y.F., Chong,T.C.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Electric signal diagnostics of plasma dynamics at an early stage of laser ablation

Hong,M.H., Lu,Y.F., Foong,A.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings Deposition of boron-carbon-nitrogen ternary thin films by ion-beam-assisted excimer ablation of B4C target

Ren,Z.M., Lu,Y.F., Ni,H.Q., He,Z.F., Chan,D.S.H., Low,T.S., Gamani,K.R.P., Chen,G., Li,K.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Optical diagnostics in laser-induced plasma-assisted ablation of fused quartz

Hong,M.H., Sugioka,K., Lu,Y.F., Midorikawa,K., Chong,T.C.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Pulsed-Laser deposition of AIN thin films

Lu,Y.F., Ren,Z.M., Ni,H.Q., Goh,Y.W., Cheong,B.A., Chow,S.K., Wang,J.P., Chong,T.C.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12