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SIMOX Thin Films. Structural and Electrical Characterisation using FTIR Spectroscopy

Author(s):
Publication title:
Application of particle and laser beams in materials technology
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
283
Pub. Year:
1995
Page(from):
603
Page(to):
612
Pages:
10
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792333241 [0792333241]
Language:
English
Call no.:
N11482/283
Type:
Conference Proceedings

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