Integrated Fabrication of Micromechanical Structures on Silicon
- Author(s):
- Greenwood J. C.
- Publication title:
- Novel silicon based technologies : proceedings of the NATO Advanced Study Institute on Novel Sillicon Based Technologies, Boca Raton, Florida, U.S.A., 17-28 July 1989
- Title of ser.:
- NATO ASI series. Series E, Applied sciences
- Ser. no.:
- 193
- Pub. Year:
- 1991
- Page(from):
- 123
- Page(to):
- 141
- Pages:
- 19
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISSN:
- 0168132X
- ISBN:
- 9780792311126 [0792311124]
- Language:
- English
- Call no.:
- N11482/193
- Type:
- Conference Proceedings
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