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Integrated Fabrication of Micromechanical Structures on Silicon

Author(s):
Greenwood J. C.  
Publication title:
Novel silicon based technologies : proceedings of the NATO Advanced Study Institute on Novel Sillicon Based Technologies, Boca Raton, Florida, U.S.A., 17-28 July 1989
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
193
Pub. Year:
1991
Page(from):
123
Page(to):
141
Pages:
19
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792311126 [0792311124]
Language:
English
Call no.:
N11482/193
Type:
Conference Proceedings

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