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PROBLEMS IN THE EXPERIMENTAL DETERMINATION OF ELECTRON ENERGY DISTRIBUTION FUNCTION IN RF DISCHARGES

Author(s):
Publication title:
Nonequilibrium processes in partially ionized gases
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
220
Pub. Year:
1990
Page(from):
451
Page(to):
458
Pages:
8
Pub. info.:
New York: Plenum Press
ISBN:
9780306435867 [0306435861]
Language:
English
Call no.:
N11479/220
Type:
Conference Proceedings

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