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Testing method for microprofile of optical supersmooth surface

Author(s):
Li,J. ( Jiangxi Academy of Sciences )
Xiao,S.
Li,X.
Ying,A.
Zhang,X.
Zhuo,A.
1 more
Publication title:
Advanced photonic sensors and applications : 30 November-3 December 1999, Singapore
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3897
Pub. Year:
1999
Page(from):
398
Page(to):
403
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434999 [081943499X]
Language:
English
Call no.:
P63600/3897
Type:
Conference Proceedings

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