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Development of a pyroelectric thin film infrared sensor by micro-opto-electro-mechanical system(MOEMS)technology

Author(s):
Ho,J.-J. ( Fortune Institute of Technology )
Fang,Y.K.
Hsieh,M.C.
Chen,C.Y.
Ting,S.F.
Lin,S.M.
Wu,K.H.
2 more
Publication title:
Advanced photonic sensors and applications : 30 November-3 December 1999, Singapore
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3897
Pub. Year:
1999
Page(from):
372
Page(to):
379
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434999 [081943499X]
Language:
English
Call no.:
P63600/3897
Type:
Conference Proceedings

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