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Micromachined flow-handing components:micropumps

Author(s):
Publication title:
Chemical microsensors and applications II : 19-20 September 1999, Boston, Massachusetts
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3857
Pub. Year:
1999
Page(from):
52
Page(to):
60
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434500 [0819434507]
Language:
English
Call no.:
P63600/3857
Type:
Conference Proceedings

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