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Intelligent control of piezoelectric actuators for precision manufacturing

Author(s):
Kwan,C. ( Intelligent Automation,Inc. )
Xu,R.
Lang,J.
Lin,C.
Stevenson,M.W.
Lin,Y.
Ren,Z.
Haynes,L.S.
3 more
Publication title:
Intelligent systems in design and manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3833
Pub. Year:
1999
Page(from):
2
Page(to):
11
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434265 [0819434264]
Language:
English
Call no.:
P63600/3833
Type:
Conference Proceedings

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