Blank Cover Image

Grating pitch measurements with the molecular measuring machine

Author(s):
Kramar,J. ( Manufacturing Engineering Lab./National Institute of Standards and Technology )
Jun,J.S.
Penzes,W.B.
Scire,F.
Teague,E.C.
Villarrubia,J.S.
1 more
Publication title:
Recent advances in metrology, characterization, and standards for optical digital data disks : 21-22 July 1999, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3806
Pub. Year:
1999
Page(from):
46
Page(to):
53
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432926 [081943292X]
Language:
English
Call no.:
P63600/3806
Type:
Conference Proceedings

Similar Items:

Silver,R.M., Jensen,C.P., Tsai,V.W., Fu,J., Villarrubia,J.S., Teague,E.C.

SPIE-The International Society for Optical Engineering

Bunday, B.D., Bishop, M., Villarrubia, J.S., Vladar, A.E.

SPIE-The International Society for Optical Engineering

2 Conference Proceedings Toward nanometer accuracy measurements

John Kramar, Edward Amatucci, David E. Gilsinn, Jau-Shi J. Jun, William B. Penzes

SPIE - The International Society of Optical Engineering

Vladar, A.E., Villarrubia, J.S., Postek, M.T.

SPIE-The International Society for Optical Engineering

Teague,E.C.

SPIE-The International Society for Optical Engineering

Chen, S. H., Stevens, W. C., Diefendorf, R. J.

American Chemical Society

Villarrubia,J.S.

SPIE-The International Society for Optical Engineering

Damazo, B.N., Jayewardene, E.C., Keery, W.J., Vladar, A.E., Postek, M.T., Jr.

SPIE-The International Society for Optical Engineering

Bunday, B.D., Bishop, M., McCormack, D.W., Jr., Villarrubia, J.S., Vladar, A.E., Dixson, R., Vorburger, T.V., Orji, …

SPIE - The International Society of Optical Engineering

W.B. Lee, H. Wang, S. To, C.F. Cheung

Trans Tech Publications

Bunday, B.D., Bishop, M., Villarrubia, J.S., Vladar, A.E.

SPIE-The International Society for Optical Engineering

Villarrubia,J.S., Vladar,A.E., Lowney,J.R., Postek,M.T., Allen,R.A., Cresswell,M.W., Ghoshtagore,R.N.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12