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DEM technique:a new three-dimensional microfabrication technique for nonsilicon materials

Author(s):
Chen,D. ( Shanghai jiao Tong Univ. )
Zhang,D.
Ding,G.
Zhao,X.
Zhang,J.
Yang,C.
Cai,B.
2 more
Publication title:
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3680
Pub. date:
1999
Vol.:
Part2
Page(from):
1099
Page(to):
1104
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431547 [0819431540]
Language:
English
Call no.:
P63600/3680
Type:
Conference Proceedings

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