Blank Cover Image

Optimization of TMAH etching for MEMS

Author(s):
Brida,S. ( ITC-IRST )
Ferrario,L.
Guarnieri,V.
Giacomozzi,F.
Margesin,B.
Paranjape,M.
Verzellesi,G.
Zen,M.
3 more
Publication title:
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3680
Pub. date:
1999
Vol.:
Part2
Page(from):
969
Page(to):
976
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431547 [0819431540]
Language:
English
Call no.:
P63600/3680
Type:
Conference Proceedings

Similar Items:

Brida,S., Ferrario,L., Giacomozzi,F., Giusti,D., Guarnieri,V., Margesin,B., Pignatel,G.U., Soncini,G., Vasiliev,A.N., …

SPIE - The International Society for Optical Engineering

Ding,G.-F., Zhao,X.-L., Yu,A., Yang,C.-S., Cai,B., Yao,X.

SPIE-The International Society for Optical Engineering

Armaroli, C., Ferrario, L., Giacomozzi, F., Lorenzelli, L., Margesin, B., Rangra, K., Tommaso, G.

ESA Publications Division

Adami, A., Lorenzelli, L., Guarnieri, V., Zen, M., Francioso, L., Siciliano, P., Forleo, A., Taurino, A. M., Agnusdei, …

SPIE - The International Society of Optical Engineering

Calliari L., Giacomozzi F., Guzman L., Margesin B., Ossi M. P.

Martinus Nijhoff Publishers

Brida, G., Genovese, M., Gramegna, M., Krivitsky, L A., Piacentini, F.

SPIE - The International Society of Optical Engineering

Alessandrello,A., Brofferio,C., Cremonesi,O., Florini,E., Giuliani,A., Nucciotti,A., Pavan,M., Pessina,G., Previtali,E., …

SPIE-The International Society for Optical Engineering

Ho,B.-C., Chang,M.-L., Lin,Y.-P.

SPIE-The International Society for Optical Engineering

Tsaur,J., Yang,S., Du,C.-H., Lin,Z., Huang,C., Lee,C.

SPIE-The International Society for Optical Engineering

Lisec,T., Kreutzer,M., Wenk,B., Wagner,B.

SPIE-The International Society for Optical Engineering

Bellutti, P., Collini, A., Ferrario, L., Zorzi, N, Zen, M.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12