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Polymeric optical MEMS

Author(s):
Hossfeld,J. ( Institut fur Mikrotechnik Mainz GmbH )
Paatzsch,T.
Schulze,J.
Neumeier,M.
Weber,L.
Bauer,H.-D.
Ehrfeld,W.
2 more
Publication title:
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3680
Pub. Year:
1999
Vol.:
Part2
Page(from):
637
Page(to):
645
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431547 [0819431540]
Language:
English
Call no.:
P63600/3680
Type:
Conference Proceedings

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