Blank Cover Image

Integrated multidisciplinary CAD/CAE environment for micro-electro-mechanical systems(MEMS)

Author(s):
Przekwas,A.J. ( CFD Research Corp. )  
Publication title:
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3680
Pub. Year:
1999
Vol.:
Part1
Page(from):
432
Page(to):
439
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431547 [0819431540]
Language:
English
Call no.:
P63600/3680
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings CFD-ACE + MEMS:a CAD system for simulation and modeling of MEMS

Stout,P.J., Yang,H.Q., Dionne,P., Leonard,A., Tan,Z., Przekwas,A.J., Krishnan,A.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Smart Sensor Multi-Chip Module with Direct-Chip-Attached Micro-Electro-Mechanical Systems(MEMS)Devices

Kirn,Namsoo P., Li,Kin, Kovach,Dan J., Chien,Chung-Ping, Tanielian,Minas H.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings Integrated mixedtechnology design environment to support micro-electro-mechanical systems development

Karam,J.M., Courtois,B., Cao,A.D., Hofmann,K.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Micro-electro-mechanical system(MEMS)component research and development for army missile applications

Hudson,T.D., McMillen,D.K., Ashley,P.R., Ruffin,P.B., Baeder,J.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Automated Design Synthesis for Micro-Electro-Mechanical Systems (MEMS)

Ningning Zhou, Alice Agogino, Kristofer S. J. Pister

American Society of Mechanical Engineers
9 Conference Proceedings MEMS(micro-electro-mechanical systems)technology:an overview and SCL's role

Tuknayat,A., Jatana,H.S., Singh,D.N.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)

Walraven,J.A., Cole Jr.,E.I., Sloan,L.R., Hietala,S.L., Tigges,C.P., Dyck,C.W.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings A Conceptual Design Synthesis Framework for Micro-Electro-Mechanical Systems (MEMS)

Y.-M. Deng, W. F. Lu

American Society of Mechanical Engineers
5 Conference Proceedings Reliability of micro-electro-mechanical systems (MEMS)

Tadigadapa,S., Najafi,N.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Polymer guided-wave integrated optics:an enabling technology for micro-opto-electro-mechanical systems

Hornak,L.A., Brown,K.S., Taylor,B.J., Barr,J.C.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Micro-electro-mechanical systems (MEMS) for enzymatic detection

Jeetender, A., Packirisamy, M., Stiharu, I. G., Balagopal, G.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings integrated CAD tools for top-down design of MEMS/MOEMS systems

Romanowicz,B.F., Bart,S.F., Gilbert,J.R.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12