Providing technology infrastructure for MEMS
- Author(s):
- Ribas,R.P. ( CMP )
- Veychard,D.
- Karam,J.M.
- Courtois,B.
- Publication title:
- Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3680
- Pub. Year:
- 1999
- Vol.:
- Part1
- Page(from):
- 298
- Page(to):
- 305
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431547 [0819431540]
- Language:
- English
- Call no.:
- P63600/3680
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Design of an APS CMOS image sensor for space applications using standard CAD tools and CMOS technology
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Integrated mixedtechnology design environment to support micro-electro-mechanical systems development
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Microsystem design framework based on tool adaptations and library developments
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |