Blank Cover Image

Providing technology infrastructure for MEMS

Author(s):
Publication title:
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3680
Pub. date:
1999
Vol.:
Part1
Page(from):
298
Page(to):
305
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431547 [0819431540]
Language:
English
Call no.:
P63600/3680
Type:
Conference Proceedings

Similar Items:

Liateni,K., Moulinier,D., Affour,B., Boutamine,H., Karam,J.M., Veychard,D., Courtois,B., Cao,A.D.

SPIE - The International Society for Optical Engineering

Boutamine,H., Karam,J.M., Courtois,B., Drake,P., Oudinot,J., El Tahawi,H., Cao,A., Rencz,M., Poppe,A., Szekely,V.

SPIE-The International Society for Optical Engineering

Goy,J., Courtois,B., Karam,J.M., Pressecq,F.

SPIE - The International Society for Optical Engineering

Markus, K.W., Wood, R., Dudley, B., Koester, D., Walters, M.

Electrochemical Society

Goy,J., Courtois,B., Karam,J.M.

SPIE-The International Society for Optical Engineering

M.M. Reimbold, W. Chong, G.V. Leandro, R.P. Ribas

Electrochemical Society

Ribas,R.P., Lescot,J., Leclercq,J.-L., Courtois,B.

SPIE-The International Society for Optical Engineering

Karam,J., Courtois,B., Holjo,M., Leclercq,J.L., Viktorovitch,P.

SPIE-The International Society for Optical Engineering

Karam,J.M., Courtois,B., Cao,A.D., Hofmann,K.

SPIE-The International Society for Optical Engineering

Karam,J.-M., Courtois,B., Rencz,M., Poppe,A., Szekely,V.

SPIE-The International Society for Optical Engineering

Karam,J.M.

SPIE-The International Society for Optical Engineering

12 Conference Proceedings Microassembly technologies for MEMS

Cohn,M.B., Bohringer,K.F., Noworolski,J.M., Singh,A., Keller,C.G., Goldberg,K.Y., Howe,R.T.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12