Structured CAD methodology for integrated MEMS and IC design

Structured CAD methodology for integrated MEMS and IC design

Author(s):

Nguyen,L. ( Tanner Research,Inc. )
Lee,H.J.
Maher,M.A.
Xu,Y.

Publication title:

Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3680

Pub. Year:

1999

Vol.:

Part1

Page(from):

259

Page(to):

265

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819431547 [0819431540]

Language:

English

Call no.:

P63600/3680

Type:

Conference Proceedings

Details

TDL ID:	ZA00019464
Series ID:	PA00000029
Conf. info. (Name):	Design, test, and microfabrication of MEMS and MOEMS
Conf. info. (Number):	1999
Conf. info. (Venue):	Paris, France
Conf. info. (Date):	1999.03.30-1999.04.01

Similar Items:

1 Conference Proceedings Moving from analysis to design:a MEMS CAD tool evolution Liateni,K., Lee,H.J., Maher,M.A., Karam,J.M. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Advanced integrated solution for MEMS design Liateni,K., Moulinier,D., Affour,B., Boutamine,H., Karam,J.M., Veychard,D., Courtois,B., Cao,A.D. SPIE - The International Society for Optical Engineering
2 Conference Proceedings 7 NEW CAD STRATECIES FOR IC/PACKAGE CO-DESIGN Nguyen,Linh M., Maher,M.A. IMAPS	8 Conference Proceedings A Prototype Enviroment for Integrated Design and Construction Planning of Buildings Fenves J. S., Flemming U., Hendrickson T. C., Maher L. M., Schmitt G. Kluwer Academic Publishers
3 Conference Proceedings MEMS system design and verification tools Maher,M.A., Lee.H.J SPIE-The International Society for Optical Engineering	9 Conference Proceedings Robust and versatile software system for optimal design of MEMS structures Kwak,B.M., Lee,S.H., Huh,J.S. SPIE - The International Society for Optical Engineering
4 Conference Proceedings CAD/CAM for MEMS and BioMEMS Hargrave, B., Irwin, B., Parkhill, R., Church, K.H., Nguyen, M.N., Kachurin, A., Warren, W.L. SPIE - The International Society of Optical Engineering	10 Conference Proceedings integrated CAD tools for top-down design of MEMS/MOEMS systems Romanowicz,B.F., Bart,S.F., Gilbert,J.R. SPIE - The International Society for Optical Engineering
5 Conference Proceedings CAD for integrated MEMS design Mukherjee,T. SPIE - The International Society for Optical Engineering	11 Conference Proceedings Design Optimization of Vehicle Structures for Idle Shake Vibration Yim,H.J., Lee,S.B. Society for Experimental Mechanics
6 Conference Proceedings A monolithically integrated HgCdTe SWIR photodetector and tunable MEMS-based optical filter Antoszewski, J., Winchester, K. J., Keating, A. J., Nguyen, T., Silva, K. K. M. B. D., Huang, H., Musca, C. A., Deli, J. … SPIE - The International Society of Optical Engineering	12 Conference Proceedings Expert Systems for Engineering Design Maher L. M. Kluwer Academic Publishers

1

2

3

4

5

6

7

8

9

10

11

12