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Surface modification of TiN and(Ti,Al)N coatings by the TEA CO2 laser

Author(s):
Publication title:
Gas and chemical lasers and intense beam applications II : 25-26 January 1999, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3612
Pub. Year:
1999
Page(from):
168
Page(to):
174
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430823 [081943082X]
Language:
English
Call no.:
P63600/3612
Type:
Conference Proceedings

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