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Suspended thermal oxide trench isolation for SCS MEMS

Author(s):
Publication title:
Microrobotics and micromanipulation : 4-5 November 1998, Boston, Massachusetts
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3519
Pub. Year:
1998
Page(from):
196
Page(to):
199
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429803 [0819429805]
Language:
English
Call no.:
P63600/3519
Type:
Conference Proceedings

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