Absolute index of refraction and its temperature dependence of calcium fluoride,barium fluoride,and strontium fluoride near 157 nm

Absolute index of refraction and its temperature dependence of calcium fluoride,barium fluoride,and strontium fluoride near 157 nm

Author(s):

Burnett,J.H. ( National Institute of Standards and Technology )
Gupta,R.
Griesmann,U.

Publication title:

Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4000

Pub. Year:

2000

Vol.:

Part2

Page(from):

1503

Page(to):

1509

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436184 [0819436186]

Language:

English

Call no.:

P63600/4000

Type:

Conference Proceedings

Details

TDL ID:	ZA00019438
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	2000 : 13th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2000.03.01-2000.03.03

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