Fluoropolyrners for 157-nm lithography:optical properties from VUV absorbance and ellipsometry measurements
- Author(s):
French,R.H. ( DuPont Co. ) Wheland,R.C. Jones,D.J. Hilfiker,J.N. Synowicki,R.A. Zumsteg,F.C. Feldman,J. Feiring,A.E. - Publication title:
- Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4000
- Pub. Year:
- 2000
- Vol.:
- Part2
- Page(from):
- 1491
- Page(to):
- 1502
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436184 [0819436186]
- Language:
- English
- Call no.:
- P63600/4000
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Behavior of candidate organic pellicle materials under 157-nm laser irradiation
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
157-nm pellicles for photolithography: mechanistic investigation of the deep-UV photolysis of fluorocarbons
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Materials design and development of fluoropolymers for use as pellicles in 157-nm photolithography
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters |
4
Conference Proceedings
Optical characterization in the vacuum ultraviolet with variable angle spectroscopic ellipsometry:157 nm and below
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Vacuum Coaters |
6
Conference Proceedings
Refractive index measurements of photoresist and antireflective coatings with variable-angle spectroscopic ellipsometry
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control
Society of Vacuum Coaters |