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Performance of very high repetition rate ArF lasers

Author(s):
Hueber,J.-M. ( Cymer,Inc. )
Besaucele,H.
Das,P.P.
Eis,R.
Ershov,A.I.
Fleurov,V.B.
Gaidarenko,D.
Hofmann,T.
Melcher,P.C.
Partlo,W.N.
Nikolaus,B.K.
Smith,S.
Webb,K.
8 more
Publication title:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
Pub. Year:
2000
Vol.:
Part2
Page(from):
1418
Page(to):
1423
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436184 [0819436186]
Language:
English
Call no.:
P63600/4000
Type:
Conference Proceedings

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