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OPC beyond 0.18 ｦﾌm:OPC on PSM gates

Author(s):
Schellenberg,F.M. ( Mentor Graphics Corp. )
Toublan,O.
Cobb,N.B.
Sahouria,E.Y.
Hughes,G.P.
MacDonald,S.S.
West,C.A.
2 more
Publication title:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
Pub. Year:
2000
Vol.:
Part2
Page(from):
1062
Page(to):
1069
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436184 [0819436186]
Language:
English
Call no.:
P63600/4000
Type:
Conference Proceedings

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