Effect of nonlinear errors on 300-mm wafer overlay performance
- Author(s):
Schmidt,S. ( Semiconductor300 GmbH ) Charles,A.B. Ganz,D. Hornig,S.R. Hraschan,G. Maltabes,J.G. Mautz,K.E. Metzdorf,T. Otto,R. Scheurich,J. Schedel,T. Schuster,R. - Publication title:
- Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4000
- Pub. Year:
- 2000
- Vol.:
- Part2
- Page(from):
- 857
- Page(to):
- 865
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436184 [0819436186]
- Language:
- English
- Call no.:
- P63600/4000
- Type:
- Conference Proceedings
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