Blank Cover Image

Mask topography effects in low k1 lithography

Author(s):
Publication title:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
Pub. Year:
2000
Vol.:
Part1
Page(from):
695
Page(to):
700
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436184 [0819436186]
Language:
English
Call no.:
P63600/4000
Type:
Conference Proceedings

Similar Items:

Gordon,R.L., Mack,C.A.

SPIE - The International Society for Optical Engineering

A. Mimotogi, M. Itoh, S. Mimotogi, K. Sato, T. Sato

Society of Photo-optical Instrumentation Engineers

Verhaegen,S., Gordon,R.L., Jonckheere,R.M., McCallum,M., Ronse,K.

SPIE-The International Society for Optical Engineering

Burkhardt, M., Gordon, R.L., Hibbs, M.S., Brunner, T.A.

SPIE-The International Society for Optical Engineering

Gordon,R.L., Flagello,D.G., McCallum,M.

SPIE - The International Society for Optical Engineering

Petersen,J.S., McCallum,M., Kachwala,N., Socha,R.J., Chen,J.F., Laidig,T.L., Smith,B.W., Gordon,R.L., Mack,C.A.

SPIE - The International Society for Optical Engineering

A. Mimotogi, M. Itoh, S. Mimotogi, K. Sato, T. Sato, S. Tanaka

SPIE - The International Society of Optical Engineering

Petersen,J.S., McCallum,M., Kachwala,N., Socha,R.J., Chen,J.F., Laidig,T.L., Smith,B.W., Gordon,R.L., Mack,C.A.

SPIE - The International Society for Optical Engineering

Friedrich,C., Mader,L., Erdmann,A., List,S., Gordon,R.L., Kalus,C.K., Griesinger,U.A., Pforr,R., Mathuni,J., Ruhl,G.G., …

SPIE - The International Society for Optical Engineering

Triebel, P., Mademann, D., Schrenk, M., Weissbrodt, P.

SPIE - The International Society of Optical Engineering

Pierrat, C., Wong, A.K.K.

SPIE-The International Society for Optical Engineering

R.A. Ferguson, A.K. Wong, T.A. Brunner, L.W. Liebmann

Society of Photo-optical Instrumentation Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12