Blank Cover Image

Integration considerations for 130-nm device patterning using ArF lithography

Author(s):
Okoroanyanwu,U. ( Advanced Micro Devices,Inc. )
Levinson,H.J.
Yang,C.-Y.
Pangrle,S.K.
Schefske,J.A.
Kent,E.
1 more
Publication title:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
Pub. date:
2000
Vol.:
Part1
Page(from):
423
Page(to):
434
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436184 [0819436186]
Language:
English
Call no.:
P63600/4000
Type:
Conference Proceedings

Similar Items:

Okoroanyanwu,U., Pike,C., Levinson,H.J.

SPIE - The International Society for Optical Engineering

La Fontaine, B.M., Pawloski, A.R., Acheta, A., Deng, Y., Levinson, H.J., Spence, C., Chovino, C., Dieu, L., Johnstone, …

SPIE - The International Society of Optical Engineering

Phan,K.A., Spence,C.A., Schefske,J.A., Okoroanyanwu,U., Levinson,H.J.

SPIE - The International Society for Optical Engineering

Hsu, S.-H., Fang, S.-P., Huang, I.H., Lin, B.S., Hung, K.-C.

SPIE - The International Society of Optical Engineering

Okoroanyanwu,U., Levinson,H.J., Romero,J., Singh,B., Lee,S.-J.

SPIE - The International Society for Optical Engineering

Lee, S.-K., Jung, J.-C., Hwang, Y.-S., Park, K.-D., Kim, J.-S., Kong, K.-K., Shin, K.-S.

SPIE-The International Society for Optical Engineering

Schefske,J.A., Kent,E., Okoroanyanwu,U., Levinson,H.J., Masud,C.R., Streefkerk,B., Hanzen,R., Brueback,J.

SPIE - The International Society for Optical Engineering

Ronse,K., Vandenberghe,G., Jaenen,P., Delvaux,C., Vangoidsenhoven,D., Roey,F.Van, Pollers,I., Maenhoudt,M., …

SPIE - The International Society for Optical Engineering

Lin,S.C., Chen,J.H., Hsu,T.H., Hung,J.C.C., Lin,J.C.H.

SPIE-The International Society for Optical Engineering

You, T.-J., Bok, C.-K., Shin, K.-S.

SPIE-The International Society for Optical Engineering

Lee,S.-H., Yim,D., Ham,Y.-M., Baik,K.-H., Choi,I.H.

SPIE - The International Society for Optical Engineering

Goo, D.-H., Kim, B.-S., Park, J.-S., Yoon, K.-S., Lee, J.-H., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12