Extension of KrF lithography to sub-50-nm pattern formation
- Author(s):
Nakao,S. ( Mitsubishi Electric Corp. ) Itoh,J. Nakae,A. Kanai,I. Saitoh,T. Matsubara,H. Tsujita,K. Arimoto,I. Wakamiya,W. - Publication title:
- Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4000
- Pub. Year:
- 2000
- Vol.:
- Part1
- Page(from):
- 358
- Page(to):
- 365
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436184 [0819436186]
- Language:
- English
- Call no.:
- P63600/4000
- Type:
- Conference Proceedings
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