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0.13-ヲフm optical lithography for random logic devices using 248-nm attenuated phase-shifting masks

Author(s):
Chen,Y.T. ( Taiwan Semiconductor Manufacturing Co.,Ltd. )
Lin,C.H.
Lin,H.T.
Hsieh,H.C.
Yu,S.S.
Yen,A.
1 more
Publication title:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
Pub. Year:
2000
Vol.:
Part1
Page(from):
99
Page(to):
110
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436184 [0819436186]
Language:
English
Call no.:
P63600/4000
Type:
Conference Proceedings

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