Fabrication of a microelectromagnetic flow sensor for microflow rate measurement

Fabrication of a microelectromagnetic flow sensor for microflow rate measurement

Author(s):

Publication title:

Smart structures and materials 2000 : smart electronics and MEMS : 6-8 March, 2000, Newport Beach, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3990

Pub. Year:

2000

Page(from):

264

Page(to):

271

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436085 [0819436089]

Language:

English

Call no.:

P63600/3990

Type:

Conference Proceedings

Details

TDL ID:	ZA00019437
Series ID:	PA00000029
Conf. info. (Name):	Smart structures and materials
Conf. info. (Number):	2000
Conf. info. (Venue):	Newport Beach, CA, USA
Conf. info. (Date):	2000.03.06-2000.03.08

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