MEMS sensing and control:an aerospace perspective
- Author(s):
Schoess,J.N. ( Honeywell Technology Ctr. ) Arch,D.K. Yang,W. Cabuz,C. Hocker,B. Johnson,B.R. Wilson,M.L. - Publication title:
- Smart structures and materials 2000 : smart electronics and MEMS : 6-8 March, 2000, Newport Beach, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3990
- Pub. Year:
- 2000
- Page(from):
- 22
- Page(to):
- 27
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436085 [0819436089]
- Language:
- English
- Call no.:
- P63600/3990
- Type:
- Conference Proceedings
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